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IBM General Technology Devision, New York, USA |
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NTT Research and Technology, Japan |
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Philips IE and Philips NatLab, Eindhoven, The Netherlands |
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Siemens, Germany |
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IMS Ionen Mikrofabrikations Systeme GmbH, Austria |
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Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, Japan |
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University of Maryland, USA |
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Technical University Dresden, Germany |
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Universite ND de la Paix, LISE, Namur, Belgium |
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Charged Particle Optics Research Group Delft University of Technology, The Netherlands |
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MAPPER Lithography b.v., Delft, The Netherlands |