Services
Modelling and design support
MonTec provides consultancy services to model particle beam systems with the
MonTec Particle Optics Simulation Tools package and support the optimisation of such systems.
Over the past decade MonTec has supported customers on such topics as:
- Monte Carlo simulation of an electron beam projection lithography system,
- Extension of the analytical models on Coulomb interactions for projection lithography systems,
- System performance evaluation of a wafer scanning electron microscope for circuit testing, and
- Verification of the design of a high throughput and high resolution maskless wafer stepper.
This work is subject to confidentiality agreements and most of the results have not been published.
MonTec co-operates on a project by project basis with the
Charged Particle Optics Research Group
of Delft University of Technology
Further information
For further information on the software and services provided by MonTec please send an email to
montec@caneval.com
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